date: 2022-01-27T15:59:35Z
pdf:PDFVersion: 1.5
pdf:docinfo:title: Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
xmp:CreatorTool: LaTeX with hyperref
access_permission:modify_annotations: true
access_permission:can_print_degraded: true
pdfa:PDFVersion: A-1b
dcterms:created: 2021-10-15T13:31:05Z
Last-Modified: 2022-01-27T15:59:35Z
dcterms:modified: 2022-01-27T15:59:35Z
dc:format: application/pdf; version=1.5
title: Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
xmpMM:DocumentID: uuid:E439BC80-3B31-966C-5AE0-AAA2E1537B81
Last-Save-Date: 2022-01-27T15:59:35Z
pdf:docinfo:creator_tool: LaTeX with hyperref
access_permission:fill_in_form: true
pdf:docinfo:modified: 2022-01-27T15:59:35Z
meta:save-date: 2022-01-27T15:59:35Z
GTS_PDFA1Version: PDF/A-1b:2005
pdf:encrypted: false
dc:title: Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering
pdf:docinfo:custom:PTEX.Fullbanner: This is pdfTeX, Version 3.14159265-2.6-1.40.20 (TeX Live 2019/W32TeX) kpathsea version 6.3.1
modified: 2022-01-27T15:59:35Z
Content-Type: application/pdf
PTEX.Fullbanner: This is pdfTeX, Version 3.14159265-2.6-1.40.20 (TeX Live 2019/W32TeX) kpathsea version 6.3.1
X-Parsed-By: org.apache.tika.parser.DefaultParser
pdfaid:conformance: B
trapped: False
meta:creation-date: 2021-10-15T13:31:05Z
created: Fri Oct 15 15:31:05 CEST 2021
access_permission:extract_for_accessibility: true
access_permission:assemble_document: true
xmpTPg:NPages: 12
Creation-Date: 2021-10-15T13:31:05Z
access_permission:extract_content: true
pdf:docinfo:custom:GTS_PDFA1Version: PDF/A-1b:2005
pdfaid:part: 1
access_permission:can_print: true
pdf:docinfo:trapped: False
producer: pdfTeX; modified using iTextSharp? 5.5.10 ©2000-2016 iText Group NV (AGPL-version)
access_permission:can_modify: true
pdf:docinfo:producer: pdfTeX; modified using iTextSharp? 5.5.10 ©2000-2016 iText Group NV (AGPL-version)
pdf:docinfo:created: 2021-10-15T13:31:05Z