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  Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

Herrero, A. F., Pflüger, M., Puls, J., Scholze, F., Soltwisch, V. (2021): Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering. - Optics Express, 29, 22, 35580-35591.
https://doi.org/10.1364/OE.430416

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Item Permalink: https://publications.pik-potsdam.de/pubman/item/item_26663 Version Permalink: https://publications.pik-potsdam.de/pubman/item/item_26663_2
Genre: Journal Article

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 Creators:
Herrero, Analía Fernández1, Author
Pflüger, Mika2, Author              
Puls, Jana1, Author
Scholze, Frank1, Author
Soltwisch, Victor1, Author
Affiliations:
1External Organizations, ou_persistent22              
2Potsdam Institute for Climate Impact Research, ou_persistent13              

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 Abstract: Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the characterization of nanostructured surfaces and compared to grazing-incidence small-angle X-ray scattering (GISAXS). The reconstruction is based on a rigorous simulation using a Maxwell solver based on finite-elements and is statistically validated with a Markov-Chain-Monte-Carlo sampling method. It is shown that in comparison to GISAXS, EUV allows to probe smaller areas and to reduce the computation times obtaining comparable uncertainties.

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 Dates: 2021-10-152021
 Publication Status: Finally published
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 Rev. Type: Peer
 Identifiers: DOI: 10.1364/OE.430416
PIKDOMAIN: RD3 - Transformation Pathways
Organisational keyword: RD3 - Transformation Pathways
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OATYPE: Gold Open Access
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Title: Optics Express
Source Genre: Journal, SCI, Scopus, p3
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Pages: - Volume / Issue: 29 (22) Sequence Number: - Start / End Page: 35580 - 35591 Identifier: CoNE: https://publications.pik-potsdam.de/cone/journals/resource/journals371
Publisher: The Optical Society