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Journal Article

Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

Authors

Herrero,  Analía Fernández
External Organizations;

/persons/resource/Mika.Pflueger

Pflüger,  Mika
Potsdam Institute for Climate Impact Research;

Puls,  Jana
External Organizations;

Scholze,  Frank
External Organizations;

Soltwisch,  Victor
External Organizations;

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26663oa.pdf
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Citation

Herrero, A. F., Pflüger, M., Puls, J., Scholze, F., Soltwisch, V. (2021): Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering. - Optics Express, 29, 22, 35580-35591.
https://doi.org/10.1364/OE.430416


Cite as: https://publications.pik-potsdam.de/pubman/item/item_26663
Abstract
Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the characterization of nanostructured surfaces and compared to grazing-incidence small-angle X-ray scattering (GISAXS). The reconstruction is based on a rigorous simulation using a Maxwell solver based on finite-elements and is statistically validated with a Markov-Chain-Monte-Carlo sampling method. It is shown that in comparison to GISAXS, EUV allows to probe smaller areas and to reduce the computation times obtaining comparable uncertainties.