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  Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

Herrero, A. F., Pflüger, M., Puls, J., Scholze, F., Soltwisch, V. (2021): Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering. - Optics Express, 29, 22, 35580-35591.
https://doi.org/10.1364/OE.430416

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 ???ViewItemFull_lblCreators???:
Herrero, Analía Fernández1, ???ENUM_CREATORROLE_AUTHOR???
Pflüger, Mika2, ???ENUM_CREATORROLE_AUTHOR???           
Puls, Jana1, ???ENUM_CREATORROLE_AUTHOR???
Scholze, Frank1, ???ENUM_CREATORROLE_AUTHOR???
Soltwisch, Victor1, ???ENUM_CREATORROLE_AUTHOR???
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1External Organizations, ou_persistent22              
2Potsdam Institute for Climate Impact Research, ou_persistent13              

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 ???ViewItemFull_lblAbstract???: Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the characterization of nanostructured surfaces and compared to grazing-incidence small-angle X-ray scattering (GISAXS). The reconstruction is based on a rigorous simulation using a Maxwell solver based on finite-elements and is statistically validated with a Markov-Chain-Monte-Carlo sampling method. It is shown that in comparison to GISAXS, EUV allows to probe smaller areas and to reduce the computation times obtaining comparable uncertainties.

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 ???ViewItemFull_lblDates???: 2021-10-152021
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???ViewItemFull_lblSourceTitle???: Optics Express
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???ENUM_IDENTIFIERTYPE_PUBLISHER???: The Optical Society