Deutsch
 
Datenschutzhinweis Impressum
  DetailsucheBrowse

Datensatz

DATENSATZ AKTIONENEXPORT
Zur Ablage hinzufügen
  Lokale TagsFreigabegeschichteDetailsÜbersicht

Freigegeben
Zeitschriftenartikel

Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

Urheber*innen

Herrero,  Analía Fernández
External Organizations;

/persons/resource/Mika.Pflueger

Pflüger,  Mika
Potsdam Institute for Climate Impact Research;

Puls,  Jana
External Organizations;

Scholze,  Frank
External Organizations;

Soltwisch,  Victor
External Organizations;

Externe Ressourcen
Es sind keine externen Ressourcen hinterlegt
Volltexte (frei zugänglich)

26663oa.pdf
(Verlagsversion), 4MB

Ergänzendes Material (frei zugänglich)
Es sind keine frei zugänglichen Ergänzenden Materialien verfügbar
Zitation

Herrero, A. F., Pflüger, M., Puls, J., Scholze, F., Soltwisch, V. (2021): Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering. - Optics Express, 29, 22, 35580-35591.
https://doi.org/10.1364/OE.430416


Zitierlink: https://publications.pik-potsdam.de/pubman/item/item_26663
Zusammenfassung
Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the characterization of nanostructured surfaces and compared to grazing-incidence small-angle X-ray scattering (GISAXS). The reconstruction is based on a rigorous simulation using a Maxwell solver based on finite-elements and is statistically validated with a Markov-Chain-Monte-Carlo sampling method. It is shown that in comparison to GISAXS, EUV allows to probe smaller areas and to reduce the computation times obtaining comparable uncertainties.